Wafer-scale fabrication of uniform Si nanowire arrays using the Si wafer with UV/Ozone pretreatment

✍ Scribed by Bai, Fan; Li, Meicheng; Huang, Rui; Yu, Yue; Gu, Tiansheng; Chen, Zhao; Fan, Huiyang; Jiang, Bing

• Book ID: 125366505
• Publisher: Springer Netherlands
• Year: 2013
• Tongue: English
• Weight: 619 KB
• Volume: 15
• Category: Article
• ISSN: 1388-0764
• DOI: 10.1007/s11051-013-1915-8