✦ LIBER ✦
Wafer-Level Self-Organized Copolymer Templates for Nanolithography with Sub-50 nm Feature and Spatial Resolutions
✍ Scribed by Sivashankar Krishnamoorthy; Krishna Kumar Manipaddy; Fung Ling Yap
- Book ID
- 102687032
- Publisher
- John Wiley and Sons
- Year
- 2011
- Tongue
- English
- Weight
- 892 KB
- Volume
- 21
- Category
- Article
- ISSN
- 1616-301X
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