Wafer charging study on a Varian 160 XP ion implanter with charge-sensitive devices

✍ Scribed by R. Nee; S. Mehta; S.B. Felch; S. Kikuchi

• Book ID: 113282368
• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 593 KB
• Volume: 55
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(91)96150-j