✦ LIBER ✦
Volumetric thin film thickness measurement using spectroscopic imaging reflectometer and compensation of reflectance modeling error
✍ Scribed by Kwangrak Kim,Seongryong Kim,Soonyang Kwon…
- Book ID
- 126367602
- Publisher
- Korean Society for Precision Engineering
- Year
- 2014
- Tongue
- English
- Weight
- 548 KB
- Volume
- 15
- Category
- Article
- ISSN
- 1229-8557
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