Effect of degas before metal gate deposi
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J. PΓ©try; K. Xiong; L.-A. Ragnarsson; R. Singanamalla; J. Hooker
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Article
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2007
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Elsevier Science
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English
β 357 KB
The interaction between the dielectric and the metal gates is crucial for effective workfunction and V T . In this work, we investigate the effect of a degas step just before the metal gate deposition. The purpose of this step is to remove the water adsorbed at the surface of the dielectric by heati