✦ LIBER ✦
Voids in epitaxial silicon films grown under different thermal conditions: void detection by thermal helium desorption
✍ Scribed by A. van Veen; A.H. Reader; D.J. Gravesteijn; A.A. van Gorkum
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 433 KB
- Volume
- 241
- Category
- Article
- ISSN
- 0040-6090
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