This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and X-ray lithography. The book's main theme is th
VLSI Technology (Principles and Applications in Engineering, 8)
โ Scribed by Wai-Kai Chen
- Year
- 2003
- Tongue
- English
- Leaves
- 399
- Edition
- 1
- Category
- Library
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is th
2nd edition. โ Noyes Publications/William Andrew, 2001. โ 1022 p.<div class="bb-sep"></div>This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist coatings, including optical lithography, el
<p><B>Gate Dielectrics and MOS ULSIs </B>provides necessary and sufficient information for those who wish to know well and go beyond the conventional SiO2 gate dielectric. The topics particularly focus on dielectric films satisfying the superior quality needed for gate dielectrics even in large-scal