VLSI Electronics: Microstructure Science. Volume 12: Silicon Materials
β Scribed by Willoughby, A.F.W.
- Book ID
- 114454220
- Publisher
- The Institution of Electrical Engineers
- Year
- 1986
- Weight
- 115 KB
- Volume
- 133
- Category
- Article
- ISSN
- 0143-7100
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
This excellent volume covers a range of materials used for flexible electronics, including semiconductors, dielectrics, and metals. The functional integration of these different materials is treated as well. Fundamental issues for both organic and inorganic materials systems are included. A correspo
As microstructured glass becomes increasingly important for microsystems technology, the main application fields include micro-fluidic systems, micro-analysis systems, sensors, micro-actuators and implants. And, because glass has quite distinct properties from silicon, PMMA and metals, applications