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Visible photoluminescence from planar amorphous silicon nitride microcavities

✍ Scribed by Serpengüzel, A.; Aydinli, A.; Bek, A.; Güre, M.


Book ID
115395682
Publisher
Optical Society of America
Year
1998
Tongue
English
Weight
213 KB
Volume
15
Category
Article
ISSN
0740-3224

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Er-doped silicon oxide (SiO:Er) thin films with Er concentrations ranging from 0.04 to $2.5 at.% were deposited on SiO 2 and Si substrates by co-evaporation of SiO and Er 2 O 3 under high vacuum. Electron energy filtered imaging and elemental mapping confirm the presence of amorphous Si nanoclusters