Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition

✍ Scribed by Elam, J. W.; Groner, M. D.; George, S. M.

• Book ID: 126896168
• Publisher: American Institute of Physics
• Year: 2002
• Tongue: English
• Weight: 506 KB
• Volume: 73
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.1490410