✦ LIBER ✦
Viscous behaviour of phosphosilicate and borophosphosilicate glasses in VLSI processing : R. A. Levy and K. Nassau. Solid St. Technol., 123 (October 1986)
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 129 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0026-2714
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