Virtual metrology and feedback control for semiconductor manufacturing processes using recursive partial least squares

✍ Scribed by Aftab A. Khan; J.R. Moyne; D.M. Tilbury

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 547 KB
• Volume: 18
• Category: Article
• ISSN: 0959-1524
• DOI: 10.1016/j.jprocont.2008.04.014