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Viewpoint: Agglomeration research in the age of disaggregation

✍ Scribed by William C. Strange


Book ID
109171036
Publisher
John Wiley and Sons
Year
2009
Tongue
English
Weight
377 KB
Volume
42
Category
Article
ISSN
0008-4085

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It is essential to suppress agglomeration of Ag films caused by thermal treatment for their successful application as new metallization materials. Co-sputtered Ag(Al) and Ag(Au) films were investigated, with regard to their change in morphology and electrical resistivity after vacuum annealing. As a