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Vibrational and thermal study of antimony oxides

✍ Scribed by Cody, C. A.; DiCarlo, L.; Darlington, R. K.

Book ID
118018556
Publisher
American Chemical Society
Year
1979
Tongue
English
Weight
619 KB
Volume
18
Category
Article
ISSN
0020-1669

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## Abstract Thin films of antimony and antimony oxides have been deposited by metal–organic (MO) CVD from a variety of metal–organic precursors at temperatures in the range 150–650 °C under both atmospheric and reduced pressure. Below 400 °C, uniform films of pure senarmontite (Sb~2~O~3~) with a mi