Vibration reduction control of a voice coil motor (VCM)-driven actuator for SPM applications

✍ Scribed by Jongkyu Jung; Woosub Youm; SungQ Lee; Kyihwan Park

• Book ID: 105853229
• Publisher: Springer
• Year: 2009
• Tongue: English
• Weight: 566 KB
• Volume: 46
• Category: Article
• ISSN: 0268-3768
• DOI: 10.1007/s00170-009-2042-7