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Very low-loss distributed X-band and Ka-band MEMS phase shifters using metal-air-metal capacitors

✍ Scribed by Hayden, J.S.; Rebeiz, G.M.

Book ID: 120180691
Publisher: IEEE
Year: 2003
Tongue: English
Weight: 445 KB
Volume: 51
Category: Article
ISSN: 0018-9480
DOI: 10.1109/TMTT.2002.806520

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