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Very high frequency SAW devices based on nanocrystalline diamond and aluminum nitride layered structure achieved using e-beam lithography

✍ Scribed by Bénédic, F.; Assouar, M.B.; Kirsch, P.; Monéger, D.; Brinza, O.; Elmazria, O.; Alnot, P.; Gicquel, A.


Book ID
122467202
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
626 KB
Volume
17
Category
Article
ISSN
0925-9635

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