Deposition and characterisation of carbo
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C Rebholz; JM Schneider; H Ziegele; B RΓ€hle; A Leyland; A Matthews
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Article
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1998
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Elsevier Science
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English
β 806 KB
## Carbon-containing tungsten coatings were deposited by magnetron sputtering onto AISI 316 stainless steel substrates in A&H, gas mixtures. Optical emission spectroscopy was used to control the C,H, gas flow. The goal of this investigation was to study the influence of the carbon content in W,_,C,