Vertically scaled MOSFET gate stacks and junctions: How far are we likely to go?

✍ Scribed by Osburn, C. M.; Kim, I.; Han, S. K.; De, I.; Yee, K. F.; Gannavaram, S.; Lee, S. J.; Lee, C.-H.; Luo, Z. J.; Zhu, W.; Hauser, J. R.; Kwong, D.-L.; Lucovsky, G.; Ma, T. P.; Ozturk, M. C.

• Book ID: 118269146
• Publisher: IBM
• Year: 2002
• Tongue: English
• Weight: 310 KB
• Volume: 46
• Category: Article
• ISSN: 0018-8646
• DOI: 10.1147/rd.462.0299