✦ LIBER ✦
Verschleiß- und Korrosionsschutzschichten aus Silizium- Basisverbindungen für den Chemischen Apparatebau. Wear and Corrosion protechive coatings of Si-based compound's for the chemical apparatus construction
✍ Scribed by B. Dresler; T. Blum; M. Hoffmann
- Publisher
- John Wiley and Sons
- Year
- 2000
- Tongue
- English
- Weight
- 123 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0947-076X
No coin nor oath required. For personal study only.
✦ Synopsis
The use of plasma enhanced CVD allows the deposition of thin films with relatively high coating rates at temperatures below 400 8C and on substrates with three-dimensional geometry. In this way it is possible to deposit amorphous ceramic thin films on the basis of silicon on temperatur-sensitive materials for tribological applications or as corrosion protective coatings to replace ceramic materials which are difficult to process and expensive in fabrication.