✦ LIBER ✦
Versatile stepper based maskless microlithography using a liquid crystal display for direct write of binary and multilevel microstructures
✍ Scribed by Kessels, Mélanie V.
- Book ID
- 120000358
- Publisher
- The International Society for Optical Engineering
- Year
- 2007
- Tongue
- English
- Weight
- 760 KB
- Volume
- 6
- Category
- Article
- ISSN
- 1932-5150
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