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Variations of energy spectra of back-scattered protons from Si single crystals

✍ Scribed by K. Sone; F. Fukuzawa


Publisher
Elsevier Science
Year
1972
Tongue
English
Weight
135 KB
Volume
40
Category
Article
ISSN
0375-9601

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Compositional inhomogeneities of (Si,Ge) single crystals grown by the radio frequency (RF) heated float zone technique have been studied using the back-scattered electron (BSE) mode of a scanning electron microscope. Numerical analysis of the images by Fast Fourier Transformation (FFT) showed that t