Variation of the parameters and composition of thin films of porous silicon as a result of oxidation: Ellipsometric studies
β Scribed by E. V. Astrova; V. B. Voronkov; A. D. Remenyuk; V. B. Shuman; V. A. Tolmachev
- Book ID
- 110120239
- Publisher
- Springer
- Year
- 1999
- Tongue
- English
- Weight
- 102 KB
- Volume
- 33
- Category
- Article
- ISSN
- 1063-7826
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