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Variation of sputtering yield with fluence and temperature for Mo metal bombarded by 25 keV He ions

✍ Scribed by Michio Tomita; Tatsuo Nate; Shinji Miyagi; Masakatsu Sakisaka


Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
892 KB
Volume
138
Category
Article
ISSN
0022-3115

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