✦ LIBER ✦
Variation of crystal quality and residual stresses in epitaxially grown thin film systems induced by ion implantation and annealing
✍ Scribed by Liu, Mei; Ruan, Haihui; Zhang, Liangchi
- Book ID
- 120393643
- Publisher
- Cambridge University Press
- Year
- 2013
- Tongue
- English
- Weight
- 527 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0884-2914
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