Study of the structural changes induced
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D. Pilloud; J.F. Pierson; M.C. Marco de Lucas; A. Cavaleiro
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Article
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2008
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Elsevier Science
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English
⚖ 513 KB
3-μm thick Ti-Si-N coatings were deposited on polished X38CrMoV5 substrates by sputtering a composite Ti-Si target in Ar-N 2 reactive mixture. Oxidation tests were performed in air at 700 °C during 2 h. Whatever the silicon content in the range 0-4 at.%, no silicon containing compound was detected b