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Varian sputtering systems and electrical feedthroughs

Publisher
Elsevier Science
Year
1968
Tongue
English
Weight
184 KB
Volume
18
Category
Article
ISSN
0042-207X

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πŸ“œ SIMILAR VOLUMES

An electrical insulator and feedthrough
An electrical insulator and feedthrough for use at cryogenic temperatures
✍ J.A. Bamberger πŸ“‚ Article πŸ“… 1974 πŸ› Elsevier Science 🌐 English βš– 196 KB

Table 1 Pumping speeds of the cryopump for H 2 and Ar with the cold trap at 4.2 K and 2.2 K respectively (Pumping speeds of N 2 and dry air are equal to those of Ar within 10%) Pumping speed, I s "1 Gas 4,2 K 2.2 K H 2 4 000 5 200 Ar 1 000 1 000 gas molecules even for low values of the sticking pro