✦ LIBER ✦
Variable work function in MOS capacitors utilizing nitrogen-controlled TiNx gate electrodes
✍ Scribed by Jörgen Westlinder; Gustaf Sjöblom; Jörgen Olsson
- Book ID
- 104050233
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 369 KB
- Volume
- 75
- Category
- Article
- ISSN
- 0167-9317
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