✦ LIBER ✦
Variable angle spectroscopic ellipsometric characterization of surface damage in chemical-mechanical polished GaAs
✍ Scribed by Yi-Ming Xiong; Paul G. Snyder
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 772 KB
- Volume
- 220
- Category
- Article
- ISSN
- 0040-6090
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