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Vaporized-metal cluster formation and effect of kinetic energy of ionized clusters on film formation

✍ Scribed by I. Yamada; H. Takaoka; H. Inokawa; H. Usui; S.C. Cheng; T. Takagi

Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 592 KB
Volume: 92
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(82)90196-1

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