Vapor Phase Epitaxy of $\bf In_{\ninmbi x}Ga_{1-{\ninmbi x}}N$ Using $\bf InCl_{3}$, $\bf GaCl_{3}$ and $\bf NH_{3}$ Sources

✍ Scribed by Takahashi, Naoyuki; Matsumoto, Ryu; Koukitu, Akinori; Seki, Hisashi

• Book ID: 121481817
• Publisher: Institute of Pure and Applied Physics
• Year: 1997
• Tongue: English
• Weight: 727 KB
• Volume: 36
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/JJAP.36.L601