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Validation of the ozone + tetramethylethylene reaction using an atmospheric pressure flow reactor/ion trap mass spectrometer

✍ Scribed by Fadel Z. Wedian; Dean B. Atkinson


Book ID
106405531
Publisher
Springer Netherlands
Year
2010
Tongue
English
Weight
340 KB
Volume
66
Category
Article
ISSN
0167-7764

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Atmospheric pressure ionization mass spectrometry (APIMS) is being routinely used to quantify trace impurities in bulk gases used in the manufacture of semiconductor devices. APIMS has been successfully applied for the quantification of ppt levels of O 2 , H 2 O, CO 2 , and CH 4 in Ar, N 2 , and He.