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Vacuum ultraviolet photochemistry in thin resist films

✍ Scribed by Bohn, Paul W.; Taylor, James W.; Guckel, Henry.

Book ID
125942527
Publisher
American Chemical Society
Year
1981
Tongue
English
Weight
810 KB
Volume
53
Category
Article
ISSN
0003-2700

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## Abstract Nitrogen‐rich organic thin films were deposited by VUV‐assisted photochemical polymerisation of flowing C~2~H~4~/NH~3~ mixtures. The fundamental reaction mechanisms of these binary gas mixtures were investigated as a function of the wavelength of two almost monochromatic VUV sources. Co