Vacuum ultraviolet ellipsometer using inclined detector as analyzer to measure stokes parameters and optical constants — With results for AlN optical constants

✍ Scribed by Saito, T.; Ozaki, K.; Fukui, K.; Iwai, H.; Yamamoto, K.; Miyake, H.; Hiramatsu, K.

• Book ID: 122182353
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 629 KB
• Volume: 571
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2014.02.099