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Vacuum Ultraviolet and Ultraviolet Radiation-Induced Effect of Hydrogenated Silicon Nitride Etching: Surface Reaction Enhancement and Damage Generation
✍ Scribed by Fukasawa, Masanaga; Miyawaki, Yudai; Kondo, Yusuke; Takeda, Keigo; Kondo, Hiroki; Ishikawa, Kenji; Sekine, Makoto; Matsugai, Hiroyasu; Honda, Takayoshi; Minami, Masaki
- Book ID
- 111900599
- Publisher
- Institute of Pure and Applied Physics
- Year
- 2012
- Tongue
- English
- Weight
- 1013 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0021-4922
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