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Vacuum sensors in biomedical measurements

✍ Scribed by A. G. Sukiyazov; N. A. Lartseva; N. G. Shevtsov

Publisher
Springer US
Year
1989
Tongue
English
Weight
262 KB
Volume
32
Category
Article
ISSN
0543-1972

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## Abstract Resistance and capacitance measurements, as a function of frequency, were carried out to analyze and model the electrical behavior of undoped titanium dioxide (TiO~2~) films. The sensing measurements were carried out in a chamber with independent temperature, pressure, gas composition,