Vacuum physics phenomena in Penning sputtering

✍ Scribed by G Vágó; L Backhausz; AR Herman

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 235 KB
• Volume: 40
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(90)90111-b