<P>Vacuum technology has enormous impact on human life in many aspects and fields, such as metallurgy, material development and production, food and electronic industry, microelectronics, device fabrication, physics, materials science, space science, engineering, chemistry, technology of low tempera
Vacuum Physics and Technology
โ Scribed by G.L. Weissler and R.W. Carlson (Eds.)
- Publisher
- Academic Press, Elsevier
- Year
- 1980
- Leaves
- 589
- Series
- Methods in Experimental Physics 14
- Category
- Library
No coin nor oath required. For personal study only.
โฆ Table of Contents
Content:
Edited by
Page iii
Copyright page
Page iv
Contributors
Pages xix-xx
Foreword
Page xxi
L. Marton, C. Marton
Preface
Page xxiii
G.L. Weissler, R.W. Carlson
1. Introduction
Pages 1-33
2. Measurement of Total Pressure in Vacuum Systems
Pages 35-80
3. Partial Pressure Measurement
Pages 81-100
4. Production of High Vacua
Pages 101-182
5. Production of Ultrahigh Vacuum
Pages 183-273
6. Metal Vacuum Systems and Components
Pages 275-311
7. Glass Vacuum Systems
Pages 313-343
8. Properties of Materials Used in Vacuum Technology
Pages 345-423
9. Guidelines for the Fabrication of Vacuum Systems and Components
Pages 425-448
10. Protective Devices for Vacuum Systems
Pages 449-456
11. Design of High Vacuum Systems
Pages 457-464
12. Operating and Maintaining High Vacuum Systems
Pages 465-475
13. Design and Performance of Bakeable Ultrahigh Vacuum Systems
Pages 477-489
14. Special Requirements in the Design, Operation, and Maintenance of Ultrahigh Vacuum Systems
Pages 491-503
15. The Fine Art of Leak Detection and Repair
Pages 505-519
16. Vacuum Deposition Techniques
Pages 521-575
Subject Index
Pages 577-593
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