✦ LIBER ✦
Vacuum deposition techniques in an engineering laboratory facility for producing thin film integrated circuits : R. D. Kraus, IEEE Trans. Prod. Engng. Prodn. (U.S.A.) PEP-7, 3 (1963), pp. 40–47
- Book ID
- 113189841
- Publisher
- Elsevier Science
- Year
- 1964
- Tongue
- English
- Weight
- 193 KB
- Volume
- 3
- Category
- Article
- ISSN
- 0026-2714
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