Vacuum deposition processes for CuInSe2 and CuInGaSe2 based solar cells

✍ Scribed by W.E. Devaney; R.A. Mickelsen

• Publisher: Elsevier Science
• Year: 1988
• Weight: 330 KB
• Volume: 24
• Category: Article
• ISSN: 0379-6787
• DOI: 10.1016/0379-6787(88)90032-4

✦ Synopsis

This paper reviews the vacuum deposition methods presently used at the Boeing High Technology Center for the preparation of each of the layers in the ternary based CuInSe2/CdZnS and quaternary based CuInGaSe2/ CdZnS solar cells. This includes the sputter deposition of the molybdenum base electrode, physical vapor deposition of the selenide layers from three (CuInSe2) or four (CuInGaSe2) elemental sources, and deposition of the mixed sulfide using either resistively heated or electron-beam evaporation sources with CdS, ZnS or CdZnS as the starting material.