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Vacancy-type defects and hardness of helium implanted CLAM steel studied by positron-annihilation spectroscopy and nano-indentation technique

โœ Scribed by Yong Xin; Xin Ju; Jie Qiu; Liping Guo; Jihong Chen; Zheng Yang; Peng Zhang; Xinzhong Cao; Baoyi Wang

Book ID
116497006
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
448 KB
Volume
87
Category
Article
ISSN
0920-3796

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The Doppler broadening spectrum of a silicon wafer was measured using a variable-energy positron beam to investigate the effects of vacancy-type defects induced by 180 keV Ar ion implantation. The Sparameter in the damaged layer decreases with annealing temperature up to 673 K, and then increases wi