VA-7 self-aligned substitutional emitter process for GaAs/(GaAl)As heterojunction bipolar transistors

✍ Scribed by Chang, M.F.; Asbeck, P.M.; Miller, D.L.; Wang, K.C.

• Book ID: 114595406
• Publisher: IEEE
• Year: 1985
• Tongue: English
• Weight: 178 KB
• Volume: 32
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1985.22359