VA-6 sputtered Si masks for GaAs etching and diffusion

✍ Scribed by Wu, X.S.; Omura, E.; Huang, T.C.; Coldren, L.A.; Merz, J.L.

• Book ID: 114595799
• Publisher: IEEE
• Year: 1986
• Tongue: English
• Weight: 163 KB
• Volume: 33
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1986.22811