✦ LIBER ✦
UV–ozone precleaning and forming gas annealing applied to wet thermal oxidation of p-type silicon carbide
✍ Scribed by Carl-Mikael Zetterling; Mikael Östling; Chris I Harris; Peter C Wood; S.Simon Wong
- Book ID
- 104420751
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 121 KB
- Volume
- 2
- Category
- Article
- ISSN
- 1369-8001
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