✦ LIBER ✦
UV nanoimprint lithography process optimization for electron device manufacturing on nanosized scale
✍ Scribed by H. Schmitt; B. Amon; S. Beuer; S. Petersen; M. Rommel; A.J. Bauer; H. Ryssel
- Book ID
- 104052097
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 356 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.