UV excimer laser drilled high aspect ratio submicron via hole

✍ Scribed by K.H. Chen; Wenhsing Wu; Byung Hwan Chu; C.Y. Chang; Jenshan Lin; S.J. Pearton; D.P. Norton; F. Ren

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 316 KB
• Volume: 256
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2009.07.105