✦ LIBER ✦
UV-deposited silicon nitride coupled with XeF2 surface cleaning for III-V optoelectronic device passivation
✍ Scribed by L.S. How Kee Chun; J.L. Courant; A. Falcou; P. Ossart; G. Post
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 322 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0167-9317
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