UV annealing of low temperature photodeposited SiO2 films with a new powerful lamp source

✍ Scribed by C. Debauche; C. Licoppe; C. Meriadec; F. Sartoris; J. Flicstein

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 311 KB
• Volume: 54
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(92)90083-a