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Utilisation of Thermal Radiation for Process Monitoring

✍ Scribed by Jan Weberpals; Tobias Hermann; Peter Berger; Holger Singpiel


Publisher
Elsevier
Year
2011
Tongue
English
Weight
692 KB
Volume
12
Category
Article
ISSN
1875-3892

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The investigated new online beam monitoring system is based on the detection of scattered light emitted from a deflecting mirror in a UV laser beam guidance system. The scattered light from the mirror is projected on a detector and the captured data is evaluated by a software. The deflecting dielect