Using the method of holography to obtain images of two-dimensional objects when solving problems of high-resolution photolithography

✍ Scribed by Koreshev, S. N.; Ratushnyi, V. P.

• Book ID: 115401596
• Publisher: Optical Society of America
• Year: 2004
• Tongue: English
• Weight: 454 KB
• Volume: 71
• Category: Article
• ISSN: 1070-9762
• DOI: 10.1364/JOT.71.000673